Photodetector with integrated optical thin film filters

CMOS compatible optical sensors with thin film interference filters

Optical microsystems with high spectral selectivity and fabrication compatible with a standard CMOS process have been realized. PN junction photodiodes are used for photodetection. A multi-layer optical filter fabricated on top of the active photodiode forms a Fabry-Perot optical resonance cavity. The resonance wavelength can be designed within the entire visible spectrum. The filters are fabri...

Thin-film spatial filters.

A thin-film optical filter used as a one-dimensional spatial filter is presented, and its design is briefly examined. The filter consists of a stack of quarter-wave dielectric layers upon a right-angle prism that selectively cancel a reflected or transmitted plane-wave front for various angles of incidence. Transmittance and reflectance are low-pass functions or high-pass functions of the angle...

Standing-Wave Transform Spectrometer Based on Integrated MEMS Mirror and Thin-Film Photodetector

In this paper, we report a novel, miniature Fourier transform spectrometer with a linear architecture that works by sampling a standing wave. The spectrometer consists of an electrostatically actuated microelectromechanical mirror with on-resonance displacement of up to 65 m, a thin-film photodetector, and an electrical back plane for actuating the mirror. The integrated device offers mirror st...

Thin Film Lasers Integrated with Planar Waveguides

Tunable thin-film filters: review and perspectives

The development of tunable filters is a key point for the ability of optical telecommunication networks to comply with the continuous evolution of the service providers needs. Among the numerous technologies which can be used to achieve narrow bandpass filtering devices, we concentrate our analysis on Thin-Film Interference Coatings and compare the principles, performances and use constraints o...